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Sensitivity Enhancement of Tube-Integrated MEMS Flow Sensor Using Flexible Copper on Polyimide Substrate

A tube-integrated flow sensor is proposed in this study by integrating a micro-electro mechanical systems (MEMS) flow-sensing element and electrical wiring structure on the same copper on polyimide (COP) substrate. The substrate was rolled into a circular tube with the flow-sensing element installed...

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Detalles Bibliográficos
Autores principales:	Tsukada, Tsuyoshi, Takigawa, Ryusei, Hasegawa, Yoshihiro, Al Farisi, Muhammad Salman, Shikida, Mitsuhiro
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9867393/ https://www.ncbi.nlm.nih.gov/pubmed/36677103 http://dx.doi.org/10.3390/mi14010042

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