Cargando…
Real-Time Ellipsometry at High and Low Temperatures
[Image: see text] Among the many available real-time characterization methods, ellipsometry stands out with the combination of high sensitivity and high speed as well as nondestructive, spectroscopic, and complex modeling capabilities. The thicknesses of thin films such as the complex dielectric fun...
| Autores principales: | , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
American Chemical Society
2023
|
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9893259/ https://www.ncbi.nlm.nih.gov/pubmed/36743061 http://dx.doi.org/10.1021/acsomega.2c07438 |