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High-Efficiency Chemical-Mechanical Magnetorheological Finishing for Ultra-Smooth Single-Crystal Silicon

To improve the material removal efficiency and surface quality of single-crystal silicon after magnetorheological finishing, a novel green chemical-mechanical magnetorheological finishing (CMMRF) fluid was developed. The main components of the CMMRF fluid are nano-Fe(3)O(4), H(2)O(2), CH(3)COOH, nan...

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Detalles Bibliográficos
Autores principales:	Lin, Zhifan, Hu, Hao, Dai, Yifan, Zhong, Yaoyu, Xue, Shuai
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9919215/ https://www.ncbi.nlm.nih.gov/pubmed/36770359 http://dx.doi.org/10.3390/nano13030398

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