Cargando…
Design and Fabrication of a Flexible Gravimetric Sensor Based on a Thin-Film Bulk Acoustic Wave Resonator
Sensing systems are becoming less and less invasive. In this context, flexible materials offer new opportunities that are impossible to achieve with bulky and rigid chips. Standard silicon sensors cannot be adapted to curved shapes and are susceptible to big deformations, thus discouraging their use...
Autores principales: | , , , , , |
---|---|
Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
|
Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9919303/ https://www.ncbi.nlm.nih.gov/pubmed/36772702 http://dx.doi.org/10.3390/s23031655 |
_version_ | 1784886791500726272 |
---|---|
author | Niro, Giovanni Marasco, Ilaria Rizzi, Francesco D’Orazio, Antonella Grande, Marco De Vittorio, Massimo |
author_facet | Niro, Giovanni Marasco, Ilaria Rizzi, Francesco D’Orazio, Antonella Grande, Marco De Vittorio, Massimo |
author_sort | Niro, Giovanni |
collection | PubMed |
description | Sensing systems are becoming less and less invasive. In this context, flexible materials offer new opportunities that are impossible to achieve with bulky and rigid chips. Standard silicon sensors cannot be adapted to curved shapes and are susceptible to big deformations, thus discouraging their use in wearable applications. Another step forward toward minimising the impacts of the sensors can be to avoid the use of cables and connectors by exploiting wireless transmissions at ultra-high frequencies (UHFs). Thin-film bulk acoustic wave resonators (FBARs) represent the most promising choice among all of the piezoelectric microelectromechanical system (MEMS) resonators for the climbing of radio frequencies. Accordingly, the fabrication of FBARs on flexible and wearable substrates represents a strategic step toward obtaining a new generation of highly sensitive wireless sensors. In this work, we propose the design and fabrication of a flexible gravimetric sensor based on an FBAR on a polymeric substrate. The resonator presents one of the highest electromechanical coupling factors in the category of flexible AlN-based FBARs, equal to 6%. Moreover, thanks to the polymeric support layer, the presence of membranes can be avoided, which leads to a faster and cheaper fabrication process and higher robustness of the structure. The mass sensitivity of the device was evaluated, obtaining a promising value of 23.31 ppm/pg. We strongly believe that these results can pave the way to a new class of wearable MEMS sensors that exploit ultra-high-frequency (UHF) transmissions. |
format | Online Article Text |
id | pubmed-9919303 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2023 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-99193032023-02-12 Design and Fabrication of a Flexible Gravimetric Sensor Based on a Thin-Film Bulk Acoustic Wave Resonator Niro, Giovanni Marasco, Ilaria Rizzi, Francesco D’Orazio, Antonella Grande, Marco De Vittorio, Massimo Sensors (Basel) Communication Sensing systems are becoming less and less invasive. In this context, flexible materials offer new opportunities that are impossible to achieve with bulky and rigid chips. Standard silicon sensors cannot be adapted to curved shapes and are susceptible to big deformations, thus discouraging their use in wearable applications. Another step forward toward minimising the impacts of the sensors can be to avoid the use of cables and connectors by exploiting wireless transmissions at ultra-high frequencies (UHFs). Thin-film bulk acoustic wave resonators (FBARs) represent the most promising choice among all of the piezoelectric microelectromechanical system (MEMS) resonators for the climbing of radio frequencies. Accordingly, the fabrication of FBARs on flexible and wearable substrates represents a strategic step toward obtaining a new generation of highly sensitive wireless sensors. In this work, we propose the design and fabrication of a flexible gravimetric sensor based on an FBAR on a polymeric substrate. The resonator presents one of the highest electromechanical coupling factors in the category of flexible AlN-based FBARs, equal to 6%. Moreover, thanks to the polymeric support layer, the presence of membranes can be avoided, which leads to a faster and cheaper fabrication process and higher robustness of the structure. The mass sensitivity of the device was evaluated, obtaining a promising value of 23.31 ppm/pg. We strongly believe that these results can pave the way to a new class of wearable MEMS sensors that exploit ultra-high-frequency (UHF) transmissions. MDPI 2023-02-02 /pmc/articles/PMC9919303/ /pubmed/36772702 http://dx.doi.org/10.3390/s23031655 Text en © 2023 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Communication Niro, Giovanni Marasco, Ilaria Rizzi, Francesco D’Orazio, Antonella Grande, Marco De Vittorio, Massimo Design and Fabrication of a Flexible Gravimetric Sensor Based on a Thin-Film Bulk Acoustic Wave Resonator |
title | Design and Fabrication of a Flexible Gravimetric Sensor Based on a Thin-Film Bulk Acoustic Wave Resonator |
title_full | Design and Fabrication of a Flexible Gravimetric Sensor Based on a Thin-Film Bulk Acoustic Wave Resonator |
title_fullStr | Design and Fabrication of a Flexible Gravimetric Sensor Based on a Thin-Film Bulk Acoustic Wave Resonator |
title_full_unstemmed | Design and Fabrication of a Flexible Gravimetric Sensor Based on a Thin-Film Bulk Acoustic Wave Resonator |
title_short | Design and Fabrication of a Flexible Gravimetric Sensor Based on a Thin-Film Bulk Acoustic Wave Resonator |
title_sort | design and fabrication of a flexible gravimetric sensor based on a thin-film bulk acoustic wave resonator |
topic | Communication |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9919303/ https://www.ncbi.nlm.nih.gov/pubmed/36772702 http://dx.doi.org/10.3390/s23031655 |
work_keys_str_mv | AT nirogiovanni designandfabricationofaflexiblegravimetricsensorbasedonathinfilmbulkacousticwaveresonator AT marascoilaria designandfabricationofaflexiblegravimetricsensorbasedonathinfilmbulkacousticwaveresonator AT rizzifrancesco designandfabricationofaflexiblegravimetricsensorbasedonathinfilmbulkacousticwaveresonator AT dorazioantonella designandfabricationofaflexiblegravimetricsensorbasedonathinfilmbulkacousticwaveresonator AT grandemarco designandfabricationofaflexiblegravimetricsensorbasedonathinfilmbulkacousticwaveresonator AT devittoriomassimo designandfabricationofaflexiblegravimetricsensorbasedonathinfilmbulkacousticwaveresonator |