Design and Fabrication of a Flexible Gravimetric Sensor Based on a Thin-Film Bulk Acoustic Wave Resonator

Sensing systems are becoming less and less invasive. In this context, flexible materials offer new opportunities that are impossible to achieve with bulky and rigid chips. Standard silicon sensors cannot be adapted to curved shapes and are susceptible to big deformations, thus discouraging their use...

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Detalles Bibliográficos
Autores principales: Niro, Giovanni, Marasco, Ilaria, Rizzi, Francesco, D’Orazio, Antonella, Grande, Marco, De Vittorio, Massimo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Communication
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9919303/
https://www.ncbi.nlm.nih.gov/pubmed/36772702
http://dx.doi.org/10.3390/s23031655

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