Fumed Silica-Based Ultra-High-Purity Synthetic Quartz Powder via Sol–Gel Process for Advanced Semiconductor Process beyond Design Rule of 3 nm

Fumed silica-based ultra-high-purity synthetic quartz powder was developed via the sol–gel process to apply to quartz wares and quartz crucibles for use in advanced semiconductor processes. The process conditions of preparing potassium silicate solution, gelation, and cleaning were optimized, i.e.,...

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Detalles Bibliográficos
Autores principales: Choi, Ji-Ho, Lee, Woo-Guk, Shim, Tae-Hun, Park, Jea-Gun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9919415/
https://www.ncbi.nlm.nih.gov/pubmed/36770351
http://dx.doi.org/10.3390/nano13030390

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9919415/
https://www.ncbi.nlm.nih.gov/pubmed/36770351
http://dx.doi.org/10.3390/nano13030390

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