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Ultra-Responsive MEMS Sensing Chip for Differential Thermal Analysis (DTA)

Ultra-responsive single-crystal silicon MEMS thermopiles for differential thermal analysis (DTA) are developed. Facilitated by a unique “microholes interetch and sealing (MIS)” technique, pairs of suspended thermopiles are batch fabricated in a differential form, with high-density (54 pairs) n-type/...

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Detalles Bibliográficos
Autores principales:	Zhang, Haozhi, Jia, Hao, Feng, Weiwen, Ni, Zao, Xu, Pengcheng, Li, Xinxin
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9920126/ https://www.ncbi.nlm.nih.gov/pubmed/36772402 http://dx.doi.org/10.3390/s23031362

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