Reciprocating Arc Silicon Strain Gauges

Currently, silicon-strain-gauge-based diaphragm pressure sensors use four single-gauge chips for high-output sensitivity. However, the four-single-gauge configuration increases the number of glass frit bonds and the number of aluminum wire bonds, reducing the long-term stability, reliability, and yi...

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Detalles Bibliográficos
Autores principales: Han, Ji-Hoon, Min, Sung Joon, Kim, Joon Hyub, Min, Nam Ki
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9920767/
https://www.ncbi.nlm.nih.gov/pubmed/36772420
http://dx.doi.org/10.3390/s23031381

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9920767/
https://www.ncbi.nlm.nih.gov/pubmed/36772420
http://dx.doi.org/10.3390/s23031381

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