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A Composite-Type MEMS Pirani Gauge for Wide Range and High Accuracy

To achieve a wide range and high accuracy detection of the vacuum level, for example, in an encapsulated vacuum microcavity, a composite-type MEMS Pirani gauge has been designed and fabricated. The Pirani gauge consists of two gauges of different sizes connected in series, with one gauge having a la...

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Detalles Bibliográficos
Autores principales:	Chen, Shuo, Feng, Liuhaodong, Guo, Song, Ji, Yucheng, Zeng, Shuwen, Peng, Xinlin, Xu, Yang, Hu, Tianbao, Wu, Zhenyu, Wang, Shinan
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9921686/ https://www.ncbi.nlm.nih.gov/pubmed/36772316 http://dx.doi.org/10.3390/s23031276

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