Damage-free LED lithography for atomically thin 2D material devices

Desired electrode patterning on two-dimensional (2D) materials is a foremost step for realizing the full potentials of 2D materials in electronic devices. Here, we introduce an approach for damage-free, on-demand manufacturing of 2D material devices using light-emitting diode (LED) lithography. The...

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Detalles Bibliográficos
Autores principales: Shi, Yue, Taniguchi, Takaaki, Byun, Ki-Nam, Kurimoto, Daiki, Yamamoto, Eisuke, Kobayashi, Makoto, Tsukagoshi, Kazuhito, Osada, Minoru
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9929066/
https://www.ncbi.nlm.nih.gov/pubmed/36788343
http://dx.doi.org/10.1038/s41598-023-29281-w

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9929066/
https://www.ncbi.nlm.nih.gov/pubmed/36788343
http://dx.doi.org/10.1038/s41598-023-29281-w

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