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The planar anodic Al(2)O(3)-ZrO(2) nanocomposite capacitor dielectrics for advanced passive device integration

The need for integrated passive devices (IPDs) emerges from the increasing consumer demand for electronic product miniaturization. Metal-insulator-metal (MIM) capacitors are vital components of IPD systems. Developing new materials and technologies is essential for advancing capacitor characteristic...

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Detalles Bibliográficos
Autores principales:	Kamnev, Kirill, Pytlicek, Zdenek, Bendova, Maria, Prasek, Jan, Gispert-Guirado, Francesc, Llobet, Eduard, Mozalev, Alexander
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Taylor & Francis 2023
Materias:	Optical, Magnetic and Electronic Device Materials
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9930859/ https://www.ncbi.nlm.nih.gov/pubmed/36818310 http://dx.doi.org/10.1080/14686996.2022.2162324

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