Study of Gallium-Doped Zinc Oxide Thin Films Processed by Atomic Layer Deposition and RF Magnetron Sputtering for Transparent Antenna Applications

[Image: see text] Gallium-doped zinc oxide (GZO) films were fabricated using RF magnetron sputtering and atomic layer deposition (ALD). The latter ones demonstrate higher electrical conductivities (up to 2700 S cm(–1)) and enhanced charge mobilities (18 cm(2) V(–1) s(–1)). The morphological analysis...

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Detalles Bibliográficos
Autores principales: Lunca-Popa, Petru, Chemin, Jean-Baptiste, Adjeroud, Noureddine, Kovacova, Veronika, Glinsek, Sebastjan, Valle, Nathalie, El Hachemi, Mohamed, Girod, Stéphanie, Bouton, Olivier, Maris, Jérôme Polesel
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2023
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9933467/
https://www.ncbi.nlm.nih.gov/pubmed/36816692
http://dx.doi.org/10.1021/acsomega.2c06574

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