Unmasking the Resolution–Throughput Tradespace of Focused-Ion-Beam Machining

Focused-ion-beam machining is a powerful process to fabricate complex nanostructures, often through a sacrificial mask that enables milling beyond the resolution limit of the ion beam. However, current understanding of this super-resolution effect is empirical in the spatial domain and nonexistent i...

Descripción completa

Detalles Bibliográficos
Autores principales: Madison, Andrew C., Villarrubia, John S., Liao, Kuo-Tang, Copeland, Craig R., Schumacher, Joshua, Siebein, Kerry, Ilic, B. Robert, Liddle, J. Alexander, Stavis, Samuel M.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9945459/
https://www.ncbi.nlm.nih.gov/pubmed/36824209
http://dx.doi.org/10.1002/adfm.202111840

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9945459/
https://www.ncbi.nlm.nih.gov/pubmed/36824209
http://dx.doi.org/10.1002/adfm.202111840

Ejemplares similares