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Unmasking the Resolution–Throughput Tradespace of Focused-Ion-Beam Machining

Focused-ion-beam machining is a powerful process to fabricate complex nanostructures, often through a sacrificial mask that enables milling beyond the resolution limit of the ion beam. However, current understanding of this super-resolution effect is empirical in the spatial domain and nonexistent i...

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Detalles Bibliográficos
Autores principales:	Madison, Andrew C., Villarrubia, John S., Liao, Kuo-Tang, Copeland, Craig R., Schumacher, Joshua, Siebein, Kerry, Ilic, B. Robert, Liddle, J. Alexander, Stavis, Samuel M.
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9945459/ https://www.ncbi.nlm.nih.gov/pubmed/36824209 http://dx.doi.org/10.1002/adfm.202111840

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