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Preparation and Performance of Multilayer Si-B-C-N/Diamond-like Carbon Gradient Films

Si-B-C-N/diamond-like carbon (DLC) gradient films with different layers were prepared on a glass substrate by radio frequency magnetron sputtering, and the structure and surface morphology of the resulting films were analyzed by scanning electron microscopy, Raman spectrometry, and X-ray photoelectr...

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Detalles Bibliográficos
Autores principales:	Duan, Jiaqi, Li, Minghan, Wang, Wenzhi, Huang, Ziming, Jiang, Hong, Ma, Yanping
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9960575/ https://www.ncbi.nlm.nih.gov/pubmed/36837295 http://dx.doi.org/10.3390/ma16041665

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