A 3C-SiC-on-Insulator-Based Integrated Photonic Platform Using an Anodic Bonding Process with Glass Substrates

Various crystalline silicon carbide (SiC) polytypes are emerging as promising photonic materials due to their wide bandgap energies and nonlinear optical properties. However, their wafer forms cannot readily provide a refractive index contrast for optical confinement in the SiC layer, which makes it...

Descripción completa

Detalles Bibliográficos
Autores principales: Li, Jiayang, Poon, Andrew W.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9962413/
https://www.ncbi.nlm.nih.gov/pubmed/36838099
http://dx.doi.org/10.3390/mi14020399

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9962413/
https://www.ncbi.nlm.nih.gov/pubmed/36838099
http://dx.doi.org/10.3390/mi14020399

Ejemplares similares