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A Novel Miniature and Selective CMOS Gas Sensor for Gas Mixture Analysis—Part 3: Extending the Chemical Modeling
This is the third part of the paper presenting a miniature, combustion-type gas sensor (dubbed GMOS) based on a novel thermal sensor (dubbed TMOS). The TMOS is a micromachined CMOS-SOI transistor, which acts as the sensing element and is integrated with a catalytic reaction plate, where ignition of...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9963620/ https://www.ncbi.nlm.nih.gov/pubmed/36837969 http://dx.doi.org/10.3390/mi14020270 |
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author | Goikhman, Boris Avraham, Moshe Bar-Lev, Sharon Stolyarova, Sara Blank, Tanya Nemirovsky, Yael |
author_facet | Goikhman, Boris Avraham, Moshe Bar-Lev, Sharon Stolyarova, Sara Blank, Tanya Nemirovsky, Yael |
author_sort | Goikhman, Boris |
collection | PubMed |
description | This is the third part of the paper presenting a miniature, combustion-type gas sensor (dubbed GMOS) based on a novel thermal sensor (dubbed TMOS). The TMOS is a micromachined CMOS-SOI transistor, which acts as the sensing element and is integrated with a catalytic reaction plate, where ignition of the gas takes place. The first part was focused on the chemical and technological aspects of the sensor. In Part 2, the emphasis was on the physical aspects of the reaction micro-hot plate on which the catalytic layer is deposited. The present study focuses on applying several advanced simulation tools, which extend our understanding of the GMOS performance, as well as pellistor sensors in general. The three main challenges in simulating the performance are: (i) how to define the operating temperature based on the input parameters; (ii) how to measure the dynamics of the temperature increase during cyclic operation at a given duty cycle; (iii) how to model the correlation between the operating temperature and the sensing response. The simulated and analytical models and measured results are shown to be in good agreement. |
format | Online Article Text |
id | pubmed-9963620 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2023 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-99636202023-02-26 A Novel Miniature and Selective CMOS Gas Sensor for Gas Mixture Analysis—Part 3: Extending the Chemical Modeling Goikhman, Boris Avraham, Moshe Bar-Lev, Sharon Stolyarova, Sara Blank, Tanya Nemirovsky, Yael Micromachines (Basel) Article This is the third part of the paper presenting a miniature, combustion-type gas sensor (dubbed GMOS) based on a novel thermal sensor (dubbed TMOS). The TMOS is a micromachined CMOS-SOI transistor, which acts as the sensing element and is integrated with a catalytic reaction plate, where ignition of the gas takes place. The first part was focused on the chemical and technological aspects of the sensor. In Part 2, the emphasis was on the physical aspects of the reaction micro-hot plate on which the catalytic layer is deposited. The present study focuses on applying several advanced simulation tools, which extend our understanding of the GMOS performance, as well as pellistor sensors in general. The three main challenges in simulating the performance are: (i) how to define the operating temperature based on the input parameters; (ii) how to measure the dynamics of the temperature increase during cyclic operation at a given duty cycle; (iii) how to model the correlation between the operating temperature and the sensing response. The simulated and analytical models and measured results are shown to be in good agreement. MDPI 2023-01-20 /pmc/articles/PMC9963620/ /pubmed/36837969 http://dx.doi.org/10.3390/mi14020270 Text en © 2023 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Goikhman, Boris Avraham, Moshe Bar-Lev, Sharon Stolyarova, Sara Blank, Tanya Nemirovsky, Yael A Novel Miniature and Selective CMOS Gas Sensor for Gas Mixture Analysis—Part 3: Extending the Chemical Modeling |
title | A Novel Miniature and Selective CMOS Gas Sensor for Gas Mixture Analysis—Part 3: Extending the Chemical Modeling |
title_full | A Novel Miniature and Selective CMOS Gas Sensor for Gas Mixture Analysis—Part 3: Extending the Chemical Modeling |
title_fullStr | A Novel Miniature and Selective CMOS Gas Sensor for Gas Mixture Analysis—Part 3: Extending the Chemical Modeling |
title_full_unstemmed | A Novel Miniature and Selective CMOS Gas Sensor for Gas Mixture Analysis—Part 3: Extending the Chemical Modeling |
title_short | A Novel Miniature and Selective CMOS Gas Sensor for Gas Mixture Analysis—Part 3: Extending the Chemical Modeling |
title_sort | novel miniature and selective cmos gas sensor for gas mixture analysis—part 3: extending the chemical modeling |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9963620/ https://www.ncbi.nlm.nih.gov/pubmed/36837969 http://dx.doi.org/10.3390/mi14020270 |
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