A Novel Miniature and Selective CMOS Gas Sensor for Gas Mixture Analysis—Part 3: Extending the Chemical Modeling

This is the third part of the paper presenting a miniature, combustion-type gas sensor (dubbed GMOS) based on a novel thermal sensor (dubbed TMOS). The TMOS is a micromachined CMOS-SOI transistor, which acts as the sensing element and is integrated with a catalytic reaction plate, where ignition of...

Descripción completa

Detalles Bibliográficos
Autores principales: Goikhman, Boris, Avraham, Moshe, Bar-Lev, Sharon, Stolyarova, Sara, Blank, Tanya, Nemirovsky, Yael
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9963620/
https://www.ncbi.nlm.nih.gov/pubmed/36837969
http://dx.doi.org/10.3390/mi14020270

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9963620/
https://www.ncbi.nlm.nih.gov/pubmed/36837969
http://dx.doi.org/10.3390/mi14020270

Ejemplares similares