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Damped Cantilever Microprobes for High-Speed Contact Metrology with 3D Surface Topography

We addressed the coating 5 mm-long cantilever microprobes with a viscoelastic material, which was intended to considerably extend the range of the traverse speed during the measurements of the 3D surface topography by damping contact-induced oscillations. The damping material was composed of epoxy g...

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Autores principales: Fahrbach, Michael, Xu, Min, Nyang’au, Wilson Ombati, Domanov, Oleg, Schwalb, Christian H., Li, Zhi, Kuhlmann, Christian, Brand, Uwe, Peiner, Erwin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9967852/
https://www.ncbi.nlm.nih.gov/pubmed/36850600
http://dx.doi.org/10.3390/s23042003
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author Fahrbach, Michael
Xu, Min
Nyang’au, Wilson Ombati
Domanov, Oleg
Schwalb, Christian H.
Li, Zhi
Kuhlmann, Christian
Brand, Uwe
Peiner, Erwin
author_facet Fahrbach, Michael
Xu, Min
Nyang’au, Wilson Ombati
Domanov, Oleg
Schwalb, Christian H.
Li, Zhi
Kuhlmann, Christian
Brand, Uwe
Peiner, Erwin
author_sort Fahrbach, Michael
collection PubMed
description We addressed the coating 5 mm-long cantilever microprobes with a viscoelastic material, which was intended to considerably extend the range of the traverse speed during the measurements of the 3D surface topography by damping contact-induced oscillations. The damping material was composed of epoxy glue, isopropyl alcohol, and glycerol, and its deposition onto the cantilever is described, as well as the tests of the completed cantilevers under free-oscillating conditions and in contact during scanning on a rough surface. The amplitude and phase of the cantilever’s fundamental out-of-plane oscillation mode was investigated vs. the damping layer thickness, which was set via repeated coating steps. The resonance frequency and quality factor decreased with the increasing thickness of the damping layer for both the free-oscillating and in-contact scanning operation mode, as expected from viscoelastic theory. A very low storage modulus of [Formula: see text] , a loss modulus of [Formula: see text] , and a density of [Formula: see text] were yielded for the damping composite. Almost critical damping was observed with an approximately 130 µm-thick damping layer in the free-oscillating case, which was effective at suppressing the ringing behavior during the high-speed in-contact probing of the rough surface topography.
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spelling pubmed-99678522023-02-27 Damped Cantilever Microprobes for High-Speed Contact Metrology with 3D Surface Topography Fahrbach, Michael Xu, Min Nyang’au, Wilson Ombati Domanov, Oleg Schwalb, Christian H. Li, Zhi Kuhlmann, Christian Brand, Uwe Peiner, Erwin Sensors (Basel) Article We addressed the coating 5 mm-long cantilever microprobes with a viscoelastic material, which was intended to considerably extend the range of the traverse speed during the measurements of the 3D surface topography by damping contact-induced oscillations. The damping material was composed of epoxy glue, isopropyl alcohol, and glycerol, and its deposition onto the cantilever is described, as well as the tests of the completed cantilevers under free-oscillating conditions and in contact during scanning on a rough surface. The amplitude and phase of the cantilever’s fundamental out-of-plane oscillation mode was investigated vs. the damping layer thickness, which was set via repeated coating steps. The resonance frequency and quality factor decreased with the increasing thickness of the damping layer for both the free-oscillating and in-contact scanning operation mode, as expected from viscoelastic theory. A very low storage modulus of [Formula: see text] , a loss modulus of [Formula: see text] , and a density of [Formula: see text] were yielded for the damping composite. Almost critical damping was observed with an approximately 130 µm-thick damping layer in the free-oscillating case, which was effective at suppressing the ringing behavior during the high-speed in-contact probing of the rough surface topography. MDPI 2023-02-10 /pmc/articles/PMC9967852/ /pubmed/36850600 http://dx.doi.org/10.3390/s23042003 Text en © 2023 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Fahrbach, Michael
Xu, Min
Nyang’au, Wilson Ombati
Domanov, Oleg
Schwalb, Christian H.
Li, Zhi
Kuhlmann, Christian
Brand, Uwe
Peiner, Erwin
Damped Cantilever Microprobes for High-Speed Contact Metrology with 3D Surface Topography
title Damped Cantilever Microprobes for High-Speed Contact Metrology with 3D Surface Topography
title_full Damped Cantilever Microprobes for High-Speed Contact Metrology with 3D Surface Topography
title_fullStr Damped Cantilever Microprobes for High-Speed Contact Metrology with 3D Surface Topography
title_full_unstemmed Damped Cantilever Microprobes for High-Speed Contact Metrology with 3D Surface Topography
title_short Damped Cantilever Microprobes for High-Speed Contact Metrology with 3D Surface Topography
title_sort damped cantilever microprobes for high-speed contact metrology with 3d surface topography
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9967852/
https://www.ncbi.nlm.nih.gov/pubmed/36850600
http://dx.doi.org/10.3390/s23042003
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