Damped Cantilever Microprobes for High-Speed Contact Metrology with 3D Surface Topography

We addressed the coating 5 mm-long cantilever microprobes with a viscoelastic material, which was intended to considerably extend the range of the traverse speed during the measurements of the 3D surface topography by damping contact-induced oscillations. The damping material was composed of epoxy g...

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Detalles Bibliográficos
Autores principales: Fahrbach, Michael, Xu, Min, Nyang’au, Wilson Ombati, Domanov, Oleg, Schwalb, Christian H., Li, Zhi, Kuhlmann, Christian, Brand, Uwe, Peiner, Erwin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9967852/
https://www.ncbi.nlm.nih.gov/pubmed/36850600
http://dx.doi.org/10.3390/s23042003

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