Generative Adversarial Network-Based Fault Detection in Semiconductor Equipment with Class-Imbalanced Data

This research proposes an application of generative adversarial networks (GANs) to solve the class imbalance problem in the fault detection and classification study of a plasma etching process. Small changes in the equipment part condition of the plasma equipment may cause an equipment fault, result...

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Detalles Bibliográficos
Autores principales: Choi, Jeong Eun, Seol, Da Hoon, Kim, Chan Young, Hong, Sang Jeen
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9967967/
https://www.ncbi.nlm.nih.gov/pubmed/36850488
http://dx.doi.org/10.3390/s23041889

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9967967/
https://www.ncbi.nlm.nih.gov/pubmed/36850488
http://dx.doi.org/10.3390/s23041889

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