A review of piezoelectric MEMS sensors and actuators for gas detection application

Piezoelectric microelectromechanical system (piezo-MEMS)-based mass sensors including the piezoelectric microcantilevers, surface acoustic waves (SAW), quartz crystal microbalance (QCM), piezoelectric micromachined ultrasonic transducer (PMUT), and film bulk acoustic wave resonators (FBAR) are highl...

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Detalles Bibliográficos
Autores principales: Ba Hashwan, Saeed S., Khir, Mohd Haris Md., Nawi, Illani Mohd, Ahmad, Mohamad Radzi, Hanif, Mehwish, Zahoor, Furqan, Al-Douri, Y., Algamili, Abdullah Saleh, Bature, Usman Isyaku, Alabsi, Sami Sultan, Sabbea, Mohammed O. Ba, Junaid, Muhammad
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2023
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9971541/
https://www.ncbi.nlm.nih.gov/pubmed/36847870
http://dx.doi.org/10.1186/s11671-023-03779-8

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