Cargando…
Uncooled two-microbolometer stack for long wavelength infrared detection
We have investigated an uncooled infrared (IR) detector utilizing a dual level architecture. This was achieved by combining two-microbolometer stack in the vertical direction to achieve high IR absorption over two distinct spectral windows across the long wavelength infrared region (LWIR). In additi...
Autores principales: | , , , |
---|---|
Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2023
|
Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9977859/ https://www.ncbi.nlm.nih.gov/pubmed/36859500 http://dx.doi.org/10.1038/s41598-023-30328-1 |
_version_ | 1784899387419262976 |
---|---|
author | Abdullah, Amjed Koppula, Akshay Alkorjia, Omar Almasri, Mahmoud |
author_facet | Abdullah, Amjed Koppula, Akshay Alkorjia, Omar Almasri, Mahmoud |
author_sort | Abdullah, Amjed |
collection | PubMed |
description | We have investigated an uncooled infrared (IR) detector utilizing a dual level architecture. This was achieved by combining two-microbolometer stack in the vertical direction to achieve high IR absorption over two distinct spectral windows across the long wavelength infrared region (LWIR). In addition, we have studied amorphous silicon germanium oxide (Si(x)Ge(y)O(1−x−y)) as an IR sensitive material, and metasurface to control IR absorption/reflection in interaction with standard Fabry–Perot cavity. The bottom microbolometer uses a metasurface to selectively absorbs a portion of the spectrum and reflects radiation outside this window range. At the same time, the top microbolometer uses a conventional Fabry–Perot resonant cavity to absorb a different portion of the spectrum and transmit any unabsorbed radiation outside this window. This device can be used to measure the absolute temperature of an object by comparing the relative signals in the two spectral bands. The spectral responsivity and detectivity, and thermal response time were > 10(5) V/W, > 10(8) cm Hz(1/2)/W, and 1.13 ms to filtered blackbody infrared radiation between (2–16) µm. The microbolometer voltage noise power spectral density was reduced by annealing the microbolometers in vacuum at 300 °C. |
format | Online Article Text |
id | pubmed-9977859 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2023 |
publisher | Nature Publishing Group UK |
record_format | MEDLINE/PubMed |
spelling | pubmed-99778592023-03-03 Uncooled two-microbolometer stack for long wavelength infrared detection Abdullah, Amjed Koppula, Akshay Alkorjia, Omar Almasri, Mahmoud Sci Rep Article We have investigated an uncooled infrared (IR) detector utilizing a dual level architecture. This was achieved by combining two-microbolometer stack in the vertical direction to achieve high IR absorption over two distinct spectral windows across the long wavelength infrared region (LWIR). In addition, we have studied amorphous silicon germanium oxide (Si(x)Ge(y)O(1−x−y)) as an IR sensitive material, and metasurface to control IR absorption/reflection in interaction with standard Fabry–Perot cavity. The bottom microbolometer uses a metasurface to selectively absorbs a portion of the spectrum and reflects radiation outside this window range. At the same time, the top microbolometer uses a conventional Fabry–Perot resonant cavity to absorb a different portion of the spectrum and transmit any unabsorbed radiation outside this window. This device can be used to measure the absolute temperature of an object by comparing the relative signals in the two spectral bands. The spectral responsivity and detectivity, and thermal response time were > 10(5) V/W, > 10(8) cm Hz(1/2)/W, and 1.13 ms to filtered blackbody infrared radiation between (2–16) µm. The microbolometer voltage noise power spectral density was reduced by annealing the microbolometers in vacuum at 300 °C. Nature Publishing Group UK 2023-03-01 /pmc/articles/PMC9977859/ /pubmed/36859500 http://dx.doi.org/10.1038/s41598-023-30328-1 Text en © The Author(s) 2023 https://creativecommons.org/licenses/by/4.0/Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons licence, and indicate if changes were made. The images or other third party material in this article are included in the article's Creative Commons licence, unless indicated otherwise in a credit line to the material. If material is not included in the article's Creative Commons licence and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this licence, visit http://creativecommons.org/licenses/by/4.0/ (https://creativecommons.org/licenses/by/4.0/) . |
spellingShingle | Article Abdullah, Amjed Koppula, Akshay Alkorjia, Omar Almasri, Mahmoud Uncooled two-microbolometer stack for long wavelength infrared detection |
title | Uncooled two-microbolometer stack for long wavelength infrared detection |
title_full | Uncooled two-microbolometer stack for long wavelength infrared detection |
title_fullStr | Uncooled two-microbolometer stack for long wavelength infrared detection |
title_full_unstemmed | Uncooled two-microbolometer stack for long wavelength infrared detection |
title_short | Uncooled two-microbolometer stack for long wavelength infrared detection |
title_sort | uncooled two-microbolometer stack for long wavelength infrared detection |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9977859/ https://www.ncbi.nlm.nih.gov/pubmed/36859500 http://dx.doi.org/10.1038/s41598-023-30328-1 |
work_keys_str_mv | AT abdullahamjed uncooledtwomicrobolometerstackforlongwavelengthinfrareddetection AT koppulaakshay uncooledtwomicrobolometerstackforlongwavelengthinfrareddetection AT alkorjiaomar uncooledtwomicrobolometerstackforlongwavelengthinfrareddetection AT almasrimahmoud uncooledtwomicrobolometerstackforlongwavelengthinfrareddetection |