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Nanoscale imaging of super-high-frequency microelectromechanical resonators with femtometer sensitivity

Implementing microelectromechanical system (MEMS) resonators calls for detailed microscopic understanding of the devices, such as energy dissipation channels, spurious modes, and imperfections from microfabrication. Here, we report the nanoscale imaging of a freestanding super-high-frequency (3 – 30...

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Detalles Bibliográficos
Autores principales:	Lee, Daehun, Jahanbani, Shahin, Kramer, Jack, Lu, Ruochen, Lai, Keji
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group UK 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9981767/ https://www.ncbi.nlm.nih.gov/pubmed/36864039 http://dx.doi.org/10.1038/s41467-023-36936-9

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