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An aerosol deposition based MEMS piezoelectric accelerometer for low noise measurement
Potentially applied in low-noise applications such as structural health monitoring (SHM), a 1-axis piezoelectric MEMS accelerometer based on aerosol deposition is designed, fabricated, simulated, and measured in this study. It is a cantilever beam structure with a tip proof mass and PZT sensing laye...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9986237/ https://www.ncbi.nlm.nih.gov/pubmed/36890847 http://dx.doi.org/10.1038/s41378-023-00484-5 |