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Integrated Glass Microfluidics with Electrochemical Nanogap Electrodes
[Image: see text] We present a framework for the fabrication of chip-based electrochemical nanogap sensors integrated with microfluidics. Instead of polydimethylsiloxane (PDMS), SU-8 aided adhesive bonding of silicon and glass wafers is used to implement parallel flow control. The fabrication proces...
Autores principales: | , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
American Chemical Society
2023
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Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9996602/ https://www.ncbi.nlm.nih.gov/pubmed/36812004 http://dx.doi.org/10.1021/acs.analchem.2c04257 |
Sumario: | [Image: see text] We present a framework for the fabrication of chip-based electrochemical nanogap sensors integrated with microfluidics. Instead of polydimethylsiloxane (PDMS), SU-8 aided adhesive bonding of silicon and glass wafers is used to implement parallel flow control. The fabrication process permits wafer-scale production with high throughput and reproducibility. Additionally, the monolithic structures allow simple electrical and fluidic connections, alleviating the need for specialized equipment. We demonstrate the utility of these flow-incorporated nanogap sensors by performing redox cycling measurements under laminar flow conditions. |
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