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Chlorination of trichlorosilane/chlorodimethylsilane using metal chlorides: experimental and mechanistic investigations

Removal of carbonaceous impurities from trichlorosilane (SiHCl(3)) reduces the carbon content of solar grade polysilicon produced with the improved Siemens method. The separation of chlorodimethylsilane (CH(3))(2)SiHCl from SiHCl(3) by distillation remains challenging due to the small difference in...

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Detalles Bibliográficos
Autores principales:	Duan, Rui, Peng, Wencai, Zhang, Jianshu, Zhang, Jinli
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	The Royal Society of Chemistry 2023
Materias:	Chemistry
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9996689/ https://www.ncbi.nlm.nih.gov/pubmed/36909759 http://dx.doi.org/10.1039/d3ra00772c

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