“…The silicon micromechanical gyroscope, which will be introduced in this paper, represents a novel MEMS gyroscope concept. …”
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“…For cylindrical shell gyroscopes, node position of their operating eigenmodes has an important influence on the gyroscopes’ performance. …”
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“…We report the first proof-of-principle demonstration of the resonant optical gyroscope with reflector that we have recently proposed. …”
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“…A micromachined gyroscope in which a high-speed spinning rotor is suspended electrostatically in a vacuum cavity usually functions as a dual-axis angular rate sensor. …”
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“…The temperature dependence of wavelength shift (TDWS) of resonator dropped to about 2 pm/°C, or even to 0 pm/°C with optimal structure, which dramatically improves the temperature stability of gyroscope system. In addition, the hybrid resonator also shows tremendous application potential in rate-grade and tactical-grade gyroscopes.…”
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“…This paper presents a theoretical analysis of mechanical and electrical noise in the sense channel of micro-electromechanical systems (MEMS) vibratory gyroscopes. Closed-form expressions for the power spectral density (PSD) of the noise equivalent rate (NER) of gyroscopes in the open-loop and the force-rebalance operations are derived by using an averaged PSD model and an equivalent transfer function. …”
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“…This paper discusses the vibration-induced error in non-ideal MEMS tuning fork gyroscopes (TFGs). Ideal TFGs which are thought to be immune to vibrations do not exist, and imbalance between two gyros of TFGs is an inevitable phenomenon. …”
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“…The proposed MIMU structure, mostly focusing on the gyroscope unit, is highly symmetrical and can be limited to an area of 10,000 μm × 10,000 μm. …”
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“…However, most previous methods have excessive input conditions, such as high rpm and input frequency, that can be only applied with other actuators. Here, a hand‐held gyroscopic generator is presented that uses the gyroscopic principle to reach a rotation rate above 8000 rpm with only hand input. …”
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“…Spin rate of a high-speed spinning-rotor gyroscope will make a significant impact on angular rate sensor performances such as the scale factor, resolution, measurement range, and bias stability. …”
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“…This paper reports a novel design for the decoupling of microelectromechanical systems (MEMS) gyroscopes. The MEMS gyroscope is based on piezoelectric aluminum nitride (AlN) film, and the main structure is a mass hung by T-shape beams. …”
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“…This paper proposes an interface application-specific-integrated-circuit (ASIC) for micro-electromechanical systems (MEMS) vibratory gyroscopes. A closed self-excited drive loop is employed for automatic amplitude stabilization based on peak detection and proportion-integration (PI) controller. …”
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“…The Resonant Integrated Optic Gyroscope (RIOG) is a type of high accuracy gyroscope based on the Sagnac effect. …”
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“…As an important inertial sensor, the gyroscope is mainly used to measure angular velocity in inertial space. …”
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“…A vacuum-sealed microelectromechanical silicon ring resonator is employed in this work, with relevance to the gyroscopic lateral modes of vibration. It is shown that a parametric pumping scheme can be implemented through capacitive electrodes surrounding the device that allows for the mode coupling strength to be dynamically tuned, as well as allowing greater flexibility in the control of the coupling stiffness. …”
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“…Finally, a gyroscope prototype with the integrated WGM resonator was verified experimentally. …”
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“…To reduce the impact of acoustic interference in a microelectromechanical system (MEMS) gyroscope and to improve the reliability of output data, a filtering algorithm based on orthogonal demodulation is proposed. …”
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“…High-precision disk resonator gyroscope has a high quality factor in order to improve the performance of the gyroscope, as the high quality factor can lead to a long starting time. …”
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“…Resonator-integrated optical gyroscopes have advantages such as all-solid-state, on-chip integration, miniaturized structure, and high precision. …”
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