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Ion implantation in semiconductors: silicon and germanium
| Autores principales: | , , |
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| Lenguaje: | eng |
| Publicado: |
Academic Press
1970
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/100622 |
| _version_ | 1780876413804478464 |
|---|---|
| author | Mayer, James W Davies, John A Eriksson, Lennart |
| author_facet | Mayer, James W Davies, John A Eriksson, Lennart |
| author_sort | Mayer, James W |
| collection | CERN |
| id | cern-100622 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 1970 |
| publisher | Academic Press |
| record_format | invenio |
| spelling | cern-1006222021-04-22T06:16:02Zhttp://cds.cern.ch/record/100622engMayer, James WDavies, John AEriksson, LennartIon implantation in semiconductors: silicon and germaniumEngineeringAcademic Pressoai:cds.cern.ch:1006221970 |
| spellingShingle | Engineering Mayer, James W Davies, John A Eriksson, Lennart Ion implantation in semiconductors: silicon and germanium |
| title | Ion implantation in semiconductors: silicon and germanium |
| title_full | Ion implantation in semiconductors: silicon and germanium |
| title_fullStr | Ion implantation in semiconductors: silicon and germanium |
| title_full_unstemmed | Ion implantation in semiconductors: silicon and germanium |
| title_short | Ion implantation in semiconductors: silicon and germanium |
| title_sort | ion implantation in semiconductors: silicon and germanium |
| topic | Engineering |
| url | http://cds.cern.ch/record/100622 |
| work_keys_str_mv | AT mayerjamesw ionimplantationinsemiconductorssiliconandgermanium AT daviesjohna ionimplantationinsemiconductorssiliconandgermanium AT erikssonlennart ionimplantationinsemiconductorssiliconandgermanium |