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Hydrogenated amorphous silicon sensors based on thin film on ASIC technology
The performance and limitations of a novel detector technology based on the deposition of a thin-film sensor on top of processed integrated circuits have been studied. Hydrogenated amorphous silicon (a-Si:H) films have been deposited on top of CMOS circuits developed for these studies and the result...
| Autores principales: | , , , , , , , |
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| Lenguaje: | eng |
| Publicado: |
2006
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/1020039 |