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Analysis and Design Principles of MEMS Devices
| Autor principal: | |
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| Lenguaje: | eng |
| Publicado: |
Elsevier
2005
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/1034649 |
| _version_ | 1780912420481400832 |
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| author | Bao, Minhang |
| author_facet | Bao, Minhang |
| author_sort | Bao, Minhang |
| collection | CERN |
| id | cern-1034649 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 2005 |
| publisher | Elsevier |
| record_format | invenio |
| spelling | cern-10346492021-04-22T02:01:08Zhttp://cds.cern.ch/record/1034649engBao, MinhangAnalysis and Design Principles of MEMS DevicesEngineeringElsevieroai:cds.cern.ch:10346492005 |
| spellingShingle | Engineering Bao, Minhang Analysis and Design Principles of MEMS Devices |
| title | Analysis and Design Principles of MEMS Devices |
| title_full | Analysis and Design Principles of MEMS Devices |
| title_fullStr | Analysis and Design Principles of MEMS Devices |
| title_full_unstemmed | Analysis and Design Principles of MEMS Devices |
| title_short | Analysis and Design Principles of MEMS Devices |
| title_sort | analysis and design principles of mems devices |
| topic | Engineering |
| url | http://cds.cern.ch/record/1034649 |
| work_keys_str_mv | AT baominhang analysisanddesignprinciplesofmemsdevices |