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Partial pressure gauges
The determination of partial pressures in vacuum systems is usually performed by mass spectrometers. The most common type is the QMS. Quadrupole mass spectrometers were developed decades ago and have been used by vacuum specialists as a diagnostic tool since then. In the first part of the paper the...
| Autores principales: | , |
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| Lenguaje: | eng |
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CERN
2007
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| Acceso en línea: | https://dx.doi.org/10.5170/CERN-2007-003.195 http://cds.cern.ch/record/1047066 |