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The use of NEG pumps and coatings in large vacuum systems: experience and limitations
Today Non Evaporable Getter (NEG) materials are commonly used for vacuum production in large vacuum systems, in particular in particle accelerators. Recently, a new technology based on NEG sputtering techniques was successfully developed by CERN and utilized at various synchrotron light sources and...
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| Lenguaje: | eng |
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CERN
2007
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| Acceso en línea: | https://dx.doi.org/10.5170/CERN-2007-003.341 http://cds.cern.ch/record/1047075 |