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7th International Conference on Ion-implantation Technology
Autores principales: | , , , , , , |
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Lenguaje: | eng |
Publicado: |
1989
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Materias: | |
Acceso en línea: | http://cds.cern.ch/record/113170 |
_version_ | 1780878646812082176 |
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author | Takagi, T Tokuyama, T Namba, S Matsuda, K Tsou Sheung Tsun Itoh, T Yamada, I |
author_facet | Takagi, T Tokuyama, T Namba, S Matsuda, K Tsou Sheung Tsun Itoh, T Yamada, I |
author_sort | Takagi, T |
collection | CERN |
id | cern-113170 |
institution | Organización Europea para la Investigación Nuclear |
language | eng |
publishDate | 1989 |
record_format | invenio |
spelling | cern-1131702021-07-30T13:26:54Zhttp://cds.cern.ch/record/113170engTakagi, TTokuyama, TNamba, SMatsuda, KTsou Sheung TsunItoh, TYamada, I7th International Conference on Ion-implantation TechnologyEngineeringoai:cds.cern.ch:1131701989 |
spellingShingle | Engineering Takagi, T Tokuyama, T Namba, S Matsuda, K Tsou Sheung Tsun Itoh, T Yamada, I 7th International Conference on Ion-implantation Technology |
title | 7th International Conference on Ion-implantation Technology |
title_full | 7th International Conference on Ion-implantation Technology |
title_fullStr | 7th International Conference on Ion-implantation Technology |
title_full_unstemmed | 7th International Conference on Ion-implantation Technology |
title_short | 7th International Conference on Ion-implantation Technology |
title_sort | 7th international conference on ion-implantation technology |
topic | Engineering |
url | http://cds.cern.ch/record/113170 |
work_keys_str_mv | AT takagit 7thinternationalconferenceonionimplantationtechnology AT tokuyamat 7thinternationalconferenceonionimplantationtechnology AT nambas 7thinternationalconferenceonionimplantationtechnology AT matsudak 7thinternationalconferenceonionimplantationtechnology AT tsousheungtsun 7thinternationalconferenceonionimplantationtechnology AT itoht 7thinternationalconferenceonionimplantationtechnology AT yamadai 7thinternationalconferenceonionimplantationtechnology |