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Materials Fundamentals of Gate Dielectrics
This book presents materials fundamentals of novel gate dielectrics that are being introduced into semiconductor manufacturing to ensure the continuous scalling of the CMOS devices. This is a very fast evolving field of research so we choose to focus on the basic understanding of the structure, ther...
| Autores principales: | , |
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| Lenguaje: | eng |
| Publicado: |
Springer
2006
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| Materias: | |
| Acceso en línea: | https://dx.doi.org/10.1007/1-4020-3078-9 http://cds.cern.ch/record/1250395 |