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Active vibration isolation of high precision machines
This paper provides a review of active control strategies used to isolate high precisionmachines (e.g. telescopes, particle colliders, interferometers, lithography machines or atomic force microscopes) from external disturbances. The objective of this review is to provide tools to develop the best s...
| Autores principales: | , , , |
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| Formato: | info:eu-repo/semantics/article |
| Lenguaje: | eng |
| Publicado: |
Diamond Light Source
2010
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| Materias: | |
| Acceso en línea: | https://dx.doi.org/10.1017/S2044820110000134 http://cds.cern.ch/record/1323818 |