Active vibration isolation of high precision machines

This paper provides a review of active control strategies used to isolate high precisionmachines (e.g. telescopes, particle colliders, interferometers, lithography machines or atomic force microscopes) from external disturbances. The objective of this review is to provide tools to develop the best s...

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Detalles Bibliográficos
Autores principales: Collette, C, Janssens, S, Artoos, K, Hauviller, C
Formato: info:eu-repo/semantics/article
Lenguaje:eng
Publicado: Diamond Light Source 2010
Materias:
Accelerators and Storage Rings
9: Technology for normal conducting higher energy linear accelerators
Acceso en línea:https://dx.doi.org/10.1017/S2044820110000134
http://cds.cern.ch/record/1323818
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author Collette, C
Janssens, S
Artoos, K
Hauviller, C
author_facet Collette, C
Janssens, S
Artoos, K
Hauviller, C
author_sort Collette, C
collection CERN
description This paper provides a review of active control strategies used to isolate high precisionmachines (e.g. telescopes, particle colliders, interferometers, lithography machines or atomic force microscopes) from external disturbances. The objective of this review is to provide tools to develop the best strategy for a given application. Firstly, the main strategies are presented and compared, using single degree of freedom models. Secondly, the case of huge structures constituted of a large number of elements, like particle colliders or segmented telescopes, is considered.
format info:eu-repo/semantics/article
id cern-1323818
institution Organización Europea para la Investigación Nuclear
language eng
publishDate 2010
publisher Diamond Light Source
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spelling cern-13238182019-09-30T06:29:59Z doi:10.1017/S2044820110000134 http://cds.cern.ch/record/1323818 eng Collette, C Janssens, S Artoos, K Hauviller, C Active vibration isolation of high precision machines Accelerators and Storage Rings 9: Technology for normal conducting higher energy linear accelerators This paper provides a review of active control strategies used to isolate high precisionmachines (e.g. telescopes, particle colliders, interferometers, lithography machines or atomic force microscopes) from external disturbances. The objective of this review is to provide tools to develop the best strategy for a given application. Firstly, the main strategies are presented and compared, using single degree of freedom models. Secondly, the case of huge structures constituted of a large number of elements, like particle colliders or segmented telescopes, is considered. info:eu-repo/grantAgreement/EC/FP7/227579 info:eu-repo/semantics/openAccess Education Level info:eu-repo/semantics/article http://cds.cern.ch/record/1323818 Diamond Light Source Diamond Light Source, (2010) pp. 1-5 2010
spellingShingle Accelerators and Storage Rings
9: Technology for normal conducting higher energy linear accelerators
Collette, C
Janssens, S
Artoos, K
Hauviller, C
Active vibration isolation of high precision machines
title Active vibration isolation of high precision machines
title_full Active vibration isolation of high precision machines
title_fullStr Active vibration isolation of high precision machines
title_full_unstemmed Active vibration isolation of high precision machines
title_short Active vibration isolation of high precision machines
title_sort active vibration isolation of high precision machines
topic Accelerators and Storage Rings
9: Technology for normal conducting higher energy linear accelerators
url https://dx.doi.org/10.1017/S2044820110000134
http://cds.cern.ch/record/1323818
http://cds.cern.ch/record/1323818
work_keys_str_mv AT collettec activevibrationisolationofhighprecisionmachines
AT janssenss activevibrationisolationofhighprecisionmachines
AT artoosk activevibrationisolationofhighprecisionmachines
AT hauvillerc activevibrationisolationofhighprecisionmachines

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