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Sputtering by particle bombardment
This volume gives a comprehensive overview about the physical processes causing sputtering of solids at bombardment with energetic ions. The most important quantities are the sputtering yields, i.e. the average number of atoms eroded per incident ion. The latest results for the sputtering yields and...
| Autores principales: | , |
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| Lenguaje: | eng |
| Publicado: |
Springer
2007
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| Materias: | |
| Acceso en línea: | https://dx.doi.org/10.1007/978-3-540-44502-9 http://cds.cern.ch/record/1338255 |