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Rare-Earth Implanted MOS Devices for Silicon Photonics: Microstructural, Electrical and Optoelectronic Properties
The book concentrates on the microstructural, electric and optoelectronic properties of rare-earth implanted MOS structures and their use as light emitters in potential applications. It describes the structural formation processes in the gate oxide during fabrication and under operation, how this mi...
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| Lenguaje: | eng |
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Springer
2010
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| Acceso en línea: | https://dx.doi.org/10.1007/978-3-642-14447-9 http://cds.cern.ch/record/1338824 |