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Langmuir probe studies and ion energy distributions in pure argon, argon + 10% oxygen and pure hydrogen discharges used for cleaning stainless steel ultrahigh vacuum chambers
| Autores principales: | , , , , , |
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| Lenguaje: | eng |
| Publicado: |
1980
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/134167 |