Recent progress in the development of 3D deep n-well CMOS MAPS

In the deep n-well (DNW) monolithic active pixel sensor (MAPS) a full in-pixel signal processing chain is integrated by exploiting the triple well option of a deep submicron CMOS process. This work is concerned with the design and characterization of DNW MAPS fabricated in a vertical integration (3D...

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Detalles Bibliográficos
Autores principales: Traversi, Gianluca, Gaioni, Luigi, Manazza, Alessia, Manghisoni, Massimo, Ratti, Lodovico, Re, Valerio, Zucca, Stefano
Formato: info:eu-repo/semantics/article
Lenguaje:eng
Publicado: JINST 2012
Materias:
Detectors and Experimental Techniques
3: Microelectronics and interconnection technology
3.2: 3D Interconnection
Acceso en línea:http://cds.cern.ch/record/1426293

Internet

http://cds.cern.ch/record/1426293

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