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Recent progress in the development of 3D deep n-well CMOS MAPS
In the deep n-well (DNW) monolithic active pixel sensor (MAPS) a full in-pixel signal processing chain is integrated by exploiting the triple well option of a deep submicron CMOS process. This work is concerned with the design and characterization of DNW MAPS fabricated in a vertical integration (3D...
| Autores principales: | , , , , , , |
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| Formato: | info:eu-repo/semantics/article |
| Lenguaje: | eng |
| Publicado: |
JINST
2012
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/1426293 |