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Multilayer Integrated Film Bulk Acoustic Resonators
Multilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated...
| Autores principales: | , |
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| Lenguaje: | eng |
| Publicado: |
Springer
2013
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| Acceso en línea: | https://dx.doi.org/10.1007/978-3-642-31776-7 http://cds.cern.ch/record/1500346 |