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Handbook of silicon based MEMS materials and technologies
| Autor principal: | |
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| Lenguaje: | eng |
| Publicado: |
William Andrew
2010
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/1539116 |
| _version_ | 1780929797373820928 |
|---|---|
| author | Lindroos, Veikko |
| author_facet | Lindroos, Veikko |
| author_sort | Lindroos, Veikko |
| collection | CERN |
| id | cern-1539116 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 2010 |
| publisher | William Andrew |
| record_format | invenio |
| spelling | cern-15391162021-04-21T22:47:35Zhttp://cds.cern.ch/record/1539116engLindroos, VeikkoHandbook of silicon based MEMS materials and technologiesXXWilliam Andrewoai:cds.cern.ch:15391162010 |
| spellingShingle | XX Lindroos, Veikko Handbook of silicon based MEMS materials and technologies |
| title | Handbook of silicon based MEMS materials and technologies |
| title_full | Handbook of silicon based MEMS materials and technologies |
| title_fullStr | Handbook of silicon based MEMS materials and technologies |
| title_full_unstemmed | Handbook of silicon based MEMS materials and technologies |
| title_short | Handbook of silicon based MEMS materials and technologies |
| title_sort | handbook of silicon based mems materials and technologies |
| topic | XX |
| url | http://cds.cern.ch/record/1539116 |
| work_keys_str_mv | AT lindroosveikko handbookofsiliconbasedmemsmaterialsandtechnologies |