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Silicon Wafer Fabrication and Microchannel for Cooling System in ALICE ITS
My summer student project covered details of the upgrade of Inner Tracking System (ITS) of the ALICE detector. The tasks are divided in two parts. First was on silicon wafer dicing technology and its resistivity under the supervision of Petra Riedler. Next was on silicon wafer microfabrication and c...
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| Lenguaje: | eng |
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2013
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| Acceso en línea: | http://cds.cern.ch/record/1595033 |