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Low pressure plasmas and microstructuring technology
A monograph that presents a perspective of gas discharge physics and its applications to various industries. It presents an overview of the different types to generate plasmas by DC discharges, capacitive and inductive radiofrequency coupling, helicon waves including electron cyclotron resonance, an...
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| Lenguaje: | eng |
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Springer
2009
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| Acceso en línea: | http://cds.cern.ch/record/1608174 |