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Low pressure plasmas and microstructuring technology
A monograph that presents a perspective of gas discharge physics and its applications to various industries. It presents an overview of the different types to generate plasmas by DC discharges, capacitive and inductive radiofrequency coupling, helicon waves including electron cyclotron resonance, an...
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| Lenguaje: | eng |
| Publicado: |
Springer
2009
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| Acceso en línea: | http://cds.cern.ch/record/1608174 |
| _version_ | 1780931790567899136 |
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| author | Franz, Gerhard |
| author_facet | Franz, Gerhard |
| author_sort | Franz, Gerhard |
| collection | CERN |
| description | A monograph that presents a perspective of gas discharge physics and its applications to various industries. It presents an overview of the different types to generate plasmas by DC discharges, capacitive and inductive radiofrequency coupling, helicon waves including electron cyclotron resonance, and ion beams. |
| id | cern-1608174 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 2009 |
| publisher | Springer |
| record_format | invenio |
| spelling | cern-16081742021-04-21T22:21:14Zhttp://cds.cern.ch/record/1608174engFranz, GerhardLow pressure plasmas and microstructuring technologyEngineeringA monograph that presents a perspective of gas discharge physics and its applications to various industries. It presents an overview of the different types to generate plasmas by DC discharges, capacitive and inductive radiofrequency coupling, helicon waves including electron cyclotron resonance, and ion beams.Springeroai:cds.cern.ch:16081742009 |
| spellingShingle | Engineering Franz, Gerhard Low pressure plasmas and microstructuring technology |
| title | Low pressure plasmas and microstructuring technology |
| title_full | Low pressure plasmas and microstructuring technology |
| title_fullStr | Low pressure plasmas and microstructuring technology |
| title_full_unstemmed | Low pressure plasmas and microstructuring technology |
| title_short | Low pressure plasmas and microstructuring technology |
| title_sort | low pressure plasmas and microstructuring technology |
| topic | Engineering |
| url | http://cds.cern.ch/record/1608174 |
| work_keys_str_mv | AT franzgerhard lowpressureplasmasandmicrostructuringtechnology |