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Transmission electron microscopy in micro-nanoelectronics
Today, the availability of bright and highly coherent electron sources and sensitive detectors has radically changed the type and quality of the information which can be obtained by transmission electron microscopy (TEM). TEMs are now present in large numbers not only in academia, but also in indus...
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| Lenguaje: | eng |
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Wiley-ISTE
2013
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| Acceso en línea: | http://cds.cern.ch/record/1616758 |