Cargando…
Enabling technology for MEMS and nanodevices
This softcover edition of the eponymous volume from the successful ""Advanced Micro & Nanosystems"" series covers all aspects of fabrication of MEMS under CMOS-compatible conditions from design to implementation.It examines the various routes and methods to combine electronic...
| Autores principales: | , , , , , |
|---|---|
| Lenguaje: | eng |
| Publicado: |
Wiley
2013
|
| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/1618468 |