Enabling technology for MEMS and nanodevices

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This softcover edition of the eponymous volume from the successful ""Advanced Micro & Nanosystems"" series covers all aspects of fabrication of MEMS under CMOS-compatible conditions from design to implementation.It examines the various routes and methods to combine electronic...

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Detalles Bibliográficos
Autores principales: Baltes, Henry, Brand, Oliver, Fedder, Gary K, Hierold, Christofer, Korvink, Jan G, Tabata, Osamu
Lenguaje:eng
Publicado: Wiley 2013
Materias:
Engineering
Acceso en línea:http://cds.cern.ch/record/1618468
Descripción
Sumario:This softcover edition of the eponymous volume from the successful ""Advanced Micro & Nanosystems"" series covers all aspects of fabrication of MEMS under CMOS-compatible conditions from design to implementation.It examines the various routes and methods to combine electronics generated by the CMOS technology with novel micromechanical parts into one-chip solutions. Various approaches, fundamental and technological aspects as well as strategies leading to different types of functionalities and presented in detail.For the practicing engineer as well as MSc and PhD students on MEMS cours

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